Solarius – Polaris
The new Polaris Desktop 3D surface measuring system from Solarius enables highly accurate and precise 3D imaging of surfaces. While the Polaris and the Polaris Plus are equal in accuracy and precision, the Polaris offers a cost effective variant for many applications. The Polaris Plus expands the scope of application due to its extensive equipment, which supports in particular simple automation of the measurement tasks.
Description
The Solarius Polaris 3D measuring system is based on the spinning disc confocal technique, proven over many years. In the design and calculation of the optics, great importance was attached to a physically optimal diffraction limitation ofthe optical system, which allows for accurate, precise and repeatable lateral measurements even in structural areas far below one micrometer.
Technical Specification
| Lateral Working Range | 150 mm x 150 mm | |
| Vertical Working Range | 400 µm to 100 mm | |
|---|---|---|
| Lateral Resoultion | 70 nm up | |
| Vertical Resolution | 0.1 nm up | |
| For further details, please refer to enclosed brochure. | ||
Key Features
- Highest optical and digital resolution
- Diffraction limited imaging
- Reliable technology
- ISO compliant roughness values
- Non-contact measurements
- Maintenance-free and robust
Sensor Types
- Confocal area sensors
- Interferometric area sensors
Key Industries
- Semiconductor, Solar & Electronics
Additional information
| Applications | Semicon Back End |
|---|---|
| Markets | Singapore |
| Solutions | Inspection Tool |
