ATV – SRO-706 Getter
ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal Getter activation.
With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. The sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process.
The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.
Key Features
- Programmable solder reflow oven
- Thermal reactor
- High vacuum package lid sealing system
- Thermal getter activation
Technical Specification
| Footprint | 960 x 720 x 1340mm (LxWxH) |
| Weight | 240kg (minumum configuration) |
| Working Height | 950 – 1050mm adjustable |
| Heated Area | 313 x 240mm |
| Chamber Lid Open/Closing | Manual open/close; Automatic lock/un-lock |
| Heating Method | 2 IR Lamp arrays within quartz tubes |
| Cooling Water Supply | Cold wall technology: Inlet max. 4bar; diff. pressure min. 2bar |
| For further details, please refer to enclosed brochure. |
Key Industries
- Semiconductor, Solar & Electronics
Brand
Founded in 1982 ATV Technologie GmbH is an international player in the field of micro electronics focussing on manufacturing and distribution of vacuum soldering devices and processing ovens.
With an expert team of engineers and physicists rooted in precision mechanics, eletronical and mechanical engineering ATV Technologie GmbH designs and develops a product range at the highest level of quality. Universities, institutes, laboratories and leading production companies worldwide appreciate our customized solutions.
ATV offers long-standing experience in designing and manufacturing high-end process systems featuring precise temperature control and excellent homogeneity for semiconductor technology and micro electronics as well as a worldwide network of special representatives who will take care of on-site sales and service.