Nordson Electronics Solutions – Automated Plasma Treatment System – FlexTRAK® SHS
Built upon Nordson Electronics Solutions’ patented plasma technology, the FlexTRAK®-SHS is our latest fully automated plasma system incorporating a high-capacity F3-S chamber, to provide high uniformity and increased productivity.
The chamber architecture remains the same as the smaller FlexTRAK platform, providing a seamless transition between chambers as production demands more capacity.
Key Applications
- Pre-wire bond plasma treatment on semiconductor package substrates and lead frames
- Pre-underfill plasma treatment on flip chip packages
- Pre-mold plasma treatment on semiconductor package substrates and lead frames
- Plasma treatment of semiconductor package substrates and lead frames for improved adhesion
- Removal/reduction of oxidation on lead frame
Technical Specifications
| W x D x H – Footprint | 2314 x 1935 x 1787 mm (2293 H mm with light tower) 91.1 x 76.2 x 70.5 in (90.3 H in with light tower) | |
| Net Weight | 1305 kg (2,871 lbs) | |
|---|---|---|
| Chamber Volume | F3-S chamber: 9.6 liters (585 in³) F3 chamber: 5.5 liters (338 in³) | |
| Powered Electrode Dimensions W x D | F3-S chamber: 305 x 610 mm (12 x 24 in) F3 chamber: 305 x 305 mm (12 x 12 in) | |
| RF Power: Standard Wattage | F3-S chamber: 1000 W F3 chamber: 600 W | |
| RF Power: Frequency | 13.56 MHz | |
| Gas Control: Maximum Number of MFCs | 4 | |
| For further details, please refer to enclosed brochure. | ||
Key Features
FlexTRAK® SHS
Industry-Leading Throughput
- Large capacity F3-S process chamber
- Simultaneous strip buffering and processing
- Advanced automation and magazine splitting capabilities
New Product Development
- Advanced material handling
- Ability to accommodate increasingly larger strip sizes
- Sophisticated jam detection
Application Flexibility
- Plasma chamber effectiveness
- Configurable process chamber
- Versatile treatment modes
Key Industries
- Semiconductor, Solar & Electronics
Nordson Electronics Solutions is a leading provider of plasma processing technology to various industries such as semiconductor, PCB, microelectronics, solar,…
